並前往https://www.che.nthu.edu.tw/zh_tw/Members/page/A-virtual-metrology-model-based-on-recursive-canonical-variate-analysis-with-applications-to-sputtering-process-Author-s-Pan-TH-Sheng-BQ-Wong-DSH-Jang-SS-Source-Journal-of-Process-Control-Volume-21-Issue-6-Page-830-839-Published-2011-1742913